Acta Mechanica Solida Sinica · 2012 · 41 citations · 18 references
EngineeringMaterials ScienceMechanical EngineeringMicroelectromechanical SystemsMicrofabricationVibrationDamped VibrationMems DesignMems MaterialsMems ResonatorsPiezoelectric CeramicsPiezoelectric MaterialsDampingDamping MechanismsMicroresonatorsPiezoelectric ResonatorsThermoelastic DampingThermoelastic ResponseTunable Resonators
18