Journal of Micromechanics and Microengineering · 2001 · 127 citations · 6 references
EngineeringBioengineeringChemical EngineeringAnalytical ChemistryMicrofabricationSensorsElectroanalytical ChemistryElectrophoretic SeparationMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsCapillary ElectrophoresisConductivity SensorsGlass Microfluidic Device FabricationMicrofluidic Device DesignMicrofluidic SensorsMicrofluidic SeparationSample InjectionThin-film Electrodes
The fabrication and characterization of a microfluidic device for capillary electrophoresis applications is presented. The device consists of a glass chip which contains a single separation channel as well as an integrated conductivity detection cell. In contrast to most microfluidic glass devices the channels are not wet etched in HF but machined by the newly developed micro powder-blasting technique which allows the creation of microstructures below 100 μm, and additionally makes parallel hole machining at very low costs outside the cleanroom environment possible [1, 2]. The integration of the conductivity detector was achieved by leading two thin-film metal electrodes inside the separation channel. For rapid sample injection the chip is mounted inside an autosampler-based capillary electrophoresis platform. The detection electrodes for conductivity detection are read out by lock-in amplifier electronics. First measurements show the successful separation of various ions in the sub-millimeter range.
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Field-Effect Flow Control for Microfabricated Fluidic Networks
Richard B. M. Schasfoort, Stefan Schlautmann, J. Hendrikse et al. · Science · 1999 · 448 citations
High resolution powder blast micromachining
H. Wensink, Henri Jansen, M. Elwenspoek · 2002 · 109 citations · Full text
Engineering, Manufacturing Engineering, Materials Engineering +13