Characterization and performance of dielectric diffusion barriers for Cu metallization - Concepedia

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Characterization and performance of dielectric diffusion barriers for Cu metallization

30

Citations

7

References

2004

Year

Zhe Chen, K. Prasad, C.Y. Li, S. S. Su, D. Gui, Ping Lu, Xiaohui He, S. Balakumar

Thin Solid Films

Materials EngineeringMaterials ScienceElectrical EngineeringElectromigration TechniqueEngineeringDiffusion ResistanceApplied PhysicsMetallurgical InteractionMetallurgical ProcessElectronic PackagingDielectric Diffusion BarriersMicrostructureElectrical Insulation

References

	Year	Citations

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