Fabrication of flexible thermopile generator

Abstract

A thermoelectric power generation system is developed with a flexible structure. Its micro fabrication has the advantage of miniaturization and integration. Thermoelectric materials are fabricated by using micro fabrication technology. The developed structure is composed of a polyimide sheet as a substrate, thermoelectric materials deposited on the substrate, a heat absorber sheet and a heat sink sheet. The flexibility of this structure depends on the wavy form of the substrate and slits in the substrate, and the heat absorber and heat sink sheets. Because of the characteristic evaluation, open-circuit voltage of 16 µV K−1 per thermocouple was obtained. In addition, the thermopile generator does not break till a bending radius of curvature of 9 mm is reached. A prospect for practical application of the thermoelectric power generator for a curved surface was confirmed.