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Comparison of optical waveguide losses in silicon-on-insulator
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1993
Year
EngineeringSilicon On InsulatorInterconnect (Integrated Circuits)Layer ThicknessOptical PropertiesNanoelectronicsGuided-wave OpticPhotonic Integrated CircuitElectronic PackagingPlanar Waveguide SensorPhotonicsElectrical EngineeringSinglemode Waveguide LossesWaveguide LossesMicroelectronicsMicrofabricationOptical WaveguidesApplied PhysicsOptical Waveguide LossesOptoelectronics
Waveguide losses in SOI (silicon-on-insulator) material fabricated by different techniques are compared thus enabling us to confirm the theoretical dependence of losses on layer thickness. Singlemode waveguide losses in BE-SOI (bond and etchback-SOI) below 0.5dB/cm are reported for waveguides with cross-sections of several square micrometres.