Phase-stepping interferometry: Five-frame algorithm with an arbitrary step

Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm

P. Hariharan, B. F. Oreb, Tomoaki Eiju · Applied Optics · 1987 · 918 citations

Natural Sciences, Vision Science, Optics +10

Digital wave-front measuring interferometry: some systematic error sources

Johannes Schwider, R. Burow, K.-E. Elßner et al. · Applied Optics · 1983 · 712 citations

Natural Sciences, Earth Sciences, Atmospheric Science +12

Generalized Data Reduction For Heterodyne Interferometry

J. E. Greivenkamp · Optical Engineering · 1984 · 338 citations

Engineering, Electrical Engineering, Optoelectronics +13

Vibration in phase-shifting interferometry

Peter J. de Groot · Journal of the Optical Society of America A · 1995 · 201 citations

Engineering, Mechanical Engineering, Metrology +16

An Optical Profilometer for Surface Characterization of Magnetic Media

James C. Wyant, Chris L. Koliopoulos, Bharat Bhushan et al. · A S L E Transactions · 1984 · 176 citations

Natural Sciences, Materials Engineering, Materials Science +17