Preparation and characterization of a reference aluminum mirror

Abstract

The preparation and characterization of a reference mirror of protected aluminum (Al) is reported. The mirror is made of 50-60-nm-thick Al film, coated with several-nanometer-thick A12O5 and 30-nm-thick film of AIN. The mirror characterization is based on reliable and precise reflectance measurements relative to a silicon- (Si-) wafer reference mirror. The simple phenomenological Drude-Lorentz model is applied for modeling the dispersion relations n(lambda) and k(lambda) of the Al film. The reflection of the protected Al mirror is determined in the 400-800-nm spectral range with accuracy better than 0.01 for p- and s-polarized light at angles of incidence from 0 degrees to 70 degrees. The accuracy has been confirmed with an evaporated thin silver film with known n(lambda), k(lambda), and d derived by photometric measurements at normal light incidence.