Studies of stress related issues in microwave CVD diamond on 〈100〉 silicon substrates - Concepedia

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Studies of stress related issues in microwave CVD diamond on 〈100〉 silicon substrates

35

Citations

8

References

1992

Year

J. Baglio, Barry C. Farnsworth, Sandra H.W. Hankin, Greg Hamill, D. O'Neil

Thin Solid Films

Materials Science〈100〉 Silicon SubstratesDiamond-like CarbonEngineeringApplied PhysicsSemiconductor Device FabricationMicrowave Cvd Diamond

References

	Year	Citations

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