Surface charge and stress in the Si/SiO2 system - Concepedia

Concepedia

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Surface charge and stress in the Si/SiO2 system

59

Citations

12

References

1973

Year

S. D. Brotherton, Tim Read, D. R. Lamb, A. F. W. Willoughby

Solid-State Electronics

Materials ScienceEngineeringSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationSurface ChargeSilicon On Insulator

References

	Year	Citations

Page 1