Microplasmas ignited and sustained by microwaves

Abstract

The challenges and benefits of microwave-induced microdischarges are reviewed. Transmission lines, resonators and surface wave launchers may be used for coupling microwave power to very small plasmas. Fortunately, microplasmas are typically much smaller than the wavelength of microwaves, and the electromagnetic problem may be treated electrostatically within the plasma. It is possible to trap electrons within small discharge gaps if the amplitude of electron oscillation is smaller than the plasma size. Typically occurring above 0.3 GHz, this condition results in lower breakdown fields than are required by direct current or radio frequency systems. Trapping of electrons also decreases the electrode potential to only tens of volts and makes the plasma density invariant in time. The steady-state microplasma produces electron densities of up to 1015 cm−3 in argon but the electrons are not in equilibrium with the low gas temperatures (500–1000 K). Microwave discharges are compared with other forms of microplasma and guidelines for device selection are recommended. Scale-up of microplasmas using array concepts are presented followed by some exciting new applications.