Concepedia

Plasma monitoring of plasma-assisted nitriding of aluminium alloys

M. Quast, Peter Mayr, Heinz-Rolf Stock

Surface and Coatings Technology · 1999 · 17 citations · 10 references

DOI

Concepts

References

10

Ion Energies at the Cathode of a Glow Discharge

William D. Davis, T. A. Vanderslice · Physical Review · 1963 · 378 citations

, , +10

Cross-section measurements for electron-impact ionization of atoms

Robert S. Freund, Robert C. Wetzel, R. J. Shul et al. · Physical Review A · 1990 · 372 citations

, , +10

Formation of aluminum nitride by intensified plasma ion nitriding

Efstathios I. Meletis · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 76 citations

, , +12

Plasma-assisted nitriding of aluminum

H.-Y. Chen, H.‐R. Stock, Peter Mayr · Surface and Coatings Technology · 1994 · 73 citations

, , +9

Energy distribution of ions in an unbalanced magnetron plasma measured with energy-resolved mass spectrometry

S. Kadlec, C. Quaeyhaegens, G. Knuyt et al. · Surface and Coatings Technology · 1997 · 66 citations

, , +8