Japanese Journal of Applied Physics · 1983 · 31 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsOxide SemiconductorsPhotovoltaic DevicesSemiconductor Device MaterialsSemiconductor SurfacesSolar Cell MaterialsSolar CellsAntireflection CoatingsEnergy Conversion EfficiencyHeterojunction Solar CellsPassivation LayersPower ConversionPower Conversion EfficiencySolar Cell FabricationSputter Deposition
Zinc phosphide (Zn 3 P 2 )/indium-tin oxide (ITO) heterojunction solar cells are fabricated by rf sputter depositing ITO on large grain polycrystalline Zn 3 P 2 wafers. An AES analysis indicates that sputter etching of the Zn 3 P 2 wafer surface before depositing ITO is of great importance in achieving a better performance as a solar cell. The passivation of Zn 3 P 2 by reaction with atomic hydrogen is found to improve the cell performance significantly. Consequently, a power conversion efficiency of 2.1% (6 mm 2 in active area) has been obtained without antireflection coating.
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