Publication | Closed Access
Deposition of palladium films by a novel supercritical fluid transport-chemical deposition process
32
Citations
17
References
1991
Year
Materials ScienceChemical EngineeringEngineeringSupercritical Fluid ChromatographySupercritical FlowPalladium FilmsChemistryChemical DepositionChemical Vapor DepositionSupercritical Co2
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