Journal of The Electrochemical Society · 1975 · 228 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferPhysical ChemistrySurface ScienceChemical Vapor DepositionChemical Vapor Deposition MaterialsChemical Vapor Deposition NucleationChemical Vapor Deposition PrecursorsLow-pressure Chemical Vapor DepositionLow-temperature Deposition