Mechanism of the radiation-induced crosslinking of copolymers of chloromethylstyrene and methylstyrene

High performance electron negative resist, chloromethylated polystyrene. A study on molecular parameters

Saburo Imamura, Toshiaki Tamamura, Katsuhiro Harada et al. · Journal of Applied Polymer Science · 1982 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +14

Microstructure of the ionic aggregates in telechelic ionomers

G. Vlaic, Claudine E. Williams, Robert Jérôme et al. · Polymer · 1988 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +11

An investigation of the lithographic properties of the poly (<i>p</i>-methylstyrene-co-chloromethylstyrene) resist system

A. Ledwith, Mya G. Mills, P. Hendy et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +11

Radiation‐Induced Reactions of Chloromethylstyrene‐Based Resist Materials Analyzed from Radiolysis of Low Molecular Model Compounds

Katsumi Tanigaki, Masayoshi Suzuki, Yasushi Saotome et al. · Journal of The Electrochemical Society · 1985 · 11 citations · Full text

Natural Sciences, Chemistry, Radiation Safety +15

Characterization of negative electron beam resists based upon generalized gel formation theory

Toshio Kobayashi, Eisuke Arai · Journal of Applied Physics · 1981 · 10 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15