Concepedia

P. Hendy

PH

2

Publications

40

Citations

2

H-Index

1985

Active since

Affiliations

BT Group (United Kingdom)(Current)

P. Hendy is an author at BT Group (United Kingdom) specializing in applied physics, engineering, and microfabrication.

Top concepts

EngineeringApplied PhysicsPhysicsPolymersChemistryMicroscopyPhotochemistryNanolithographyOptoelectronicsPolymer Science

Publications per year

1985–1985

2

Publications

2

0.1 μ scale lithography using a conventional electron beam system

C. Dix, P. G. Flavin, P. Hendy et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 23 citations

Optical Materials, Electron Scattering, Engineering +18

An investigation of the lithographic properties of the poly (<i>p</i>-methylstyrene-co-chloromethylstyrene) resist system

A. Ledwith, Mya G. Mills, P. Hendy et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 17 citations

Engineering, Electron-beam Lithography, Chlorine Plasma +17

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