Publication | Closed Access
Approach to control deposition of ultra thin films from metal organic precursors: Ru deposition
31
Citations
6
References
2007
Year
Materials ScienceRu DepositionEngineeringThin-film FabricationSurface ScienceApplied PhysicsUltra Thin FilmsMetal Organic PrecursorsThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing
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