Restoration of Optical Properties of Surfaces by Radiofrequency-Excited Oxygen

Abstract

Surfaces of mirrors or other optical devices employed in satellite programs will in time become contaminated with thin layers of polymer films. These films orginate most probably from outgassing followed by polymerization by uv radiation. The contaminant films degrade the reflectance of mirrors and the performance of critical optical surfaces. Atomic oxygen from an rf plasma restores optical surfaces to their original properties by rapid noncontaminating, nondestructive oxidation of the polymer film.