High-Resolution Imaging by Fourier Transform X-ray Holography

Ian McNulty, Janos Kirz, Chris Jacobsen, Erik H. Anderson, Malcolm R. Howells, D. P. Kern

Science · 1992 · 314 citations · 16 references

Concepts

TL;DR

Fourier transform X‑ray holography can image sub‑micrometer gold structures, achieving resolutions down to 60 nm. Using 3.4‑nm coherent soft X‑ray radiation from beamline X1A, the specimen is positioned near a Fresnel zone‑plate focal spot so that scattered and reference waves interfere to form low‑frequency hologram fringes recorded on a CCD and numerically reconstructed into an image.

Abstract

Fourier transform x-ray holography has been used to image gold test objects with submicrometer structure, resolving features as small as 60 nanometers. The hologram-recording instrument uses coherent 3.4-nanometer radiation from the soft x-ray undulator beamline X1A at the National Synchrotron Light Source. The specimen to be imaged is placed near the first-order focal spot produced by a Fresnel zone plate; the other orders, chiefly the zeroth, illuminate the specimen. The wave scattered by the specimen interferes with the spherical reference wave from the focal spot, forming a hologram with fringes of low spatial frequency. The hologram is recorded in digital form by a charge-coupled device camera, and the specimen image is obtained by numerical reconstruction.

References

16