Journal of Applied Physics · 2001 · 164 citations · 15 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsLight-emitting DiodesOptoelectronic DevicesOptoelectronic MaterialsOxide SemiconductorsP-n JunctionsSemiconductor HeterostructuresDevice FabricationElectroluminescenceHeterojunction DevicesLight-emitting DevicesPhotolithographyPulsed Laser DepositionSemiconductor Oxide Thin FilmsUltraviolet Light-emitting Diodes
An ultraviolet light-emitting diode (UV-LED) was realized using a p-n heterojunction composed of the transparent oxide semiconductors p-SrCu2O2 and n-ZnO. A Ni/SrCu2O2/ZnO/ITO multilayered film was epitaxially grown on an extremely flat YSZ (111) surface by a pulsed-laser deposition technique. SrCu2O2 (112) was preferentially grown on ZnO (0001) at 350°C, while the preferential plane was changed into the (100) when the temperature was increased to 600 °C. The grown films were processed by conventional photolithography followed by reactive ion etching to fabricate heterojunction diodes. The resulting devices exhibited rectifying I-V characteristics inherent to p-n junctions. A relatively sharp electroluminescence band centered at 382 nm, attributed to transitions associated with exciton-exciton collision or electron-hole plasma in ZnO, was generated by applying a forward bias voltage greater than the turn-on voltage of 3 V. UV-LED performance characteristics such as threshold current and conversion efficiency improved with higher SrCu2O2 deposition temperatures. On the other hand, increased laser power density at 600 °C during deposition raised the incidence of insulating layer formation between the p and n layers, probably due to migration of K+ ions doped as an acceptor impurity. The resulting p-i-n diode emits broad luminescence centered at 500 nm for forward voltage greater than 14 V.
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