Deposition of NbN thin films onto high-speed steel using reactive magnetron sputtering for corrosion protective applications

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

Natural Sciences, Materials Science, Physics +12

Microstructure and mechanical/thermal properties of Cr–N coatings deposited by reactive unbalanced magnetron sputtering

P.H. Mayrhofer, Guido Tischler, Christian Mitterer · Surface and Coatings Technology · 2001 · 235 citations

Natural Sciences, Materials Engineering, Materials Science +16

Deposition and properties of polycrystalline TiN/NbN superlattice coatings

Xiaoyu Chu, Ming‐Show Wong, W.D. Sproul et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 188 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reactive sputter deposition of polycrystalline nitride and oxide superlattice coatings

William D. Sproul · Surface and Coatings Technology · 1996 · 101 citations

Natural Sciences, Materials Engineering, Materials Science +16