The energy levels and the defect signature of sulfur-implanted silicon by thermally stimulated measurements - Concepedia

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The energy levels and the defect signature of sulfur-implanted silicon by thermally stimulated measurements

18

Citations

8

References

1978

Year

R. Y. Koyama, W. E. Phillips, David R. Myers, Yechun Liu, H.B. Dietrich

Solid-State Electronics

Defect SignatureElectrical EngineeringIon ImplantationEngineeringPhysicsApplied PhysicsDefect FormationSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSulfur-implanted SiliconOptoelectronicsEnergy LevelsSilicon Debugging

References

	Year	Citations

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