Review of Scientific Instruments · 2003 · 11 citations · 5 references
EngineeringMaterials EngineeringPackaging DesignSemiconductor DevicesSurface EngineeringVacuum FormingVacuum PackagingConical SpringsFlange TechnologyVacuum ConditionsVacuum SystemsVacuum TechnologyZinc Selenide
We have developed a removable and bakeable viewport for UHV applications. The viewport consists of a modified blank Conflat flange; a ring of flux-free solder to form a vacuum seal; a viewport window; a clamping flange, and conical disk springs. We have cyclically baked viewports up to 240 °C and have achieved an ultimate pressure of 1.2×10−10 Torr (limited by our pumping station), with no leak detected at the 10−10 atm cm3/s level. Both BK7 and zinc selenide windows have been used successfully.
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Optical window sealed with indium for ultrahigh vacuum
Hiroshi Saeki, Junji Ikeda, Hajime ISHIMARU · Vacuum · 1989 · 16 citations