Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition

Gas-assisted focused electron beam and ion beam processing and fabrication

Ivo Utke, P. Hoffmann, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 1K citations · Full text

Engineering, Materials Engineering, Materials Science +16

A critical literature review of focused electron beam induced deposition

Willem F. van Dorp · Journal of Applied Physics · 2008 · 506 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

Steven Randolph, Jason D. Fowlkes, Philip D. Rack · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 2006 · 414 citations

Engineering, Materials Engineering, Materials Science +15

Focused electron beam induced deposition: A perspective

Michael Huth, Fabrizio Porrati, Christian H. Schwalb et al. · Beilstein Journal of Nanotechnology · 2012 · 257 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Three dimensional magnetic nanowires grown by focused electron-beam induced deposition

Amalio Fernández‐Pacheco, Luis Serrano-Ramón, Ján Michalík et al. · Scientific Reports · 2013 · 169 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17