Concepedia
Materials Science and Engineering A · 2007 · 99 citations · 16 references
Materials ScienceEngineeringMicrofabricationNanotechnologyMechanical EngineeringSilicon SubstratesSemiconductor Device FabricationNanolithographySilicon On InsulatorMicroelectronicsNanolithography Method
16
Grinding technology-theory and applications of machining with abrasives
W.B. Rowe · Tribology International · 1990 · 419 citations
Materials Science, Engineering, Material Machining +4
Ductile‐Regime Machining of Germanium and Silicon
Peter Blake, Ronald O. Scattergood · Journal of the American Ceramic Society · 1990 · 409 citations
Materials Science, Engineering, Material Machining +13
Mechanical deformation in silicon by micro-indentation
J. E. Bradby, J. S. Williams, J. Wong‐Leung et al. · Journal of materials research/Pratt's guide to venture capital sources · 2001 · 257 citations
Engineering, Severe Plastic Deformation, Micromechanics +7
Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon
J. E. Bradby, J. S. Williams, J. Wong‐Leung et al. · Applied Physics Letters · 2000 · 223 citations
Engineering, Severe Plastic Deformation, Mechanical Engineering +17
Towards a deeper understanding of plastic deformation in mono-crystalline silicon
Liangchi Zhang, I. Zarudi · International Journal of Mechanical Sciences · 2001 · 204 citations
Materials Science, Engineering, Severe Plastic Deformation +9