Publication | Closed Access
Mechanical deformation in silicon by micro-indentation
257
Citations
23
References
2001
Year
EngineeringSevere Plastic DeformationMicromechanicsMicrofabricationMechanical EngineeringSolid MechanicsSilicon On InsulatorMechanical DeformationMechanics Of MaterialsMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1