Publication | Closed Access
Preparation and properties of microcrystalline silicon films using photochemical vapor deposition
26
Citations
5
References
1983
Year
Materials ScienceEngineeringPhotochemical Vapor DepositionMicrofabricationSilicon On InsulatorApplied PhysicsThin FilmsChemical DepositionMicrocrystalline Silicon FilmsChemical Vapor DepositionThin Film Processing
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