Microelectronic Engineering · 1990 · 13 citations · 7 references
Natural SciencesPhysicsPhotonicsPlasma PhysicsAccelerator PhysicsElectron Beam PhysicsUltrafast OpticsBeam BlankingElectron Beam FocusingPulsed Electron Beams
7
Electron beam blanking systems
Hiromu Fujioka, Katsumi Ura · Scanning · 1983 · 30 citations
Plug-in fast electron beam chopping system
H. Sadorf, Henrik Kratz · Review of Scientific Instruments · 1985 · 14 citations