Concepedia

Publication | Closed Access

Measurement of in-plane and depth strain profiles in strained-Si substrates

DOI

17

Citations

16

References

2007

Year

Atsushi Ogura, Daisuke Kosemura, Kosuke Yamasaki, Satoshi Tanaka, Yasuto Kakemura, Akiko Kitano, Ichiro Hirosawa
Solid-State Electronics

References

YearCitations

Page 1