Publication | Closed Access

Step-flow mechanism versus pit corrosion: scanning-tunneling microscopy observations on wet etching of Si(111) by HF solutions

Materials ScienceScanning-tunneling Microscopy ObservationsHf SolutionsEngineeringTunneling MicroscopyMicrofabricationSurface AnalysisSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingWet Etching