Thin Solid Films · 1996 · 10 citations · 2 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsPlasma PhysicsThin FilmsPlasma DiagnosticsPlasma FundamentalsPlasma SourcesPlasma Surface TreatmentPlasma-wall InteractionsThin-film DepositionPlasma DepositionPlasma PolymerizationPlasma Treatment Of PolymersPulsed OperationPulsed Plasma Sources
2
2–10 nm scale plasma polymerized organic films
K. Senda, G. K. Vinogradov, Sucheta Gorwadkar et al. · Journal of Applied Physics · 1993 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +17