Concepedia

High resolution studies of crystalline damage induced by lapping and single-point diamond machining of Si(100)

Roderick R. Kunz, Harry Clark, P. M. Nitishin, M. Rothschild, B. Ahern

Journal of materials research/Pratt's guide to venture capital sources · 1996 · 34 citations · 6 references

DOI

Concepts

References

6

Ductile‐Regime Machining of Germanium and Silicon

Peter Blake, Ronald O. Scattergood · Journal of the American Ceramic Society · 1990 · 422 citations

, , +15

Ductile-regime machining model for diamond turning of brittle materials

W.S. Blackley, R.O. Scattergood · Precision Engineering · 1991 · 279 citations

, , +11

Ductile-Regime Grinding Of Brittle Materials: Experimental Results And The Development Of A Model

Thomas G. Bifano, T. A. Dow, Ron O. Scattergood · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 71 citations

, , +16

Crystal Orientation Dependence of Machning Damage–A Stress Model

W.S. Blackley, Ronald O. Scattergood · Journal of the American Ceramic Society · 1990 · 51 citations

, , +15

Contact Damage in Single‐Crystalline Silicon Investigated by Cross‐Sectional Transmission Electron Microscopy

Stefan Johansson, Jan‐Åke Schweitz · Journal of the American Ceramic Society · 1988 · 39 citations

, , +17