Improved tribological properties of sputtered MoS<i>x</i> films by ion beam mixing

Abstract

Ion beam mixing yielded a distinct enhancement in the sliding life of sputtered MoSx films without any deterioration of the excellent lubrication properties. This effect occurs only at higher ion energies indicating an improved film-substrate adherence caused by a mixing of the interface, which was confirmed by secondary ion mass spectrometry and topographical investigations. In addition to that a considerable enhancement of the film density was found due to a reorientation of the MoSx platelets which led also to an improvement of the effective film thickness.