Publication | Closed Access
EXTENSION OF THE McNUTT-SAH METHOD FOR MEASURING THIN OXIDE THICKNESSES OF MOS DEVICES
13
Citations
5
References
1998
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsSemiconductor Device FabricationMicroelectronicsThin Film ProcessingSemiconductor Device
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