Study on strain and piezoelectric polarization of AlN thin films grown on Si

Abstract

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Yongzhen Deng, Yuechan Kong, Youdou Zheng, Chunhong Zhou, Dongjuan Xi, Peng Chen, Shulin Gu, Bo Shen, Rong Zhang, Ping Han, Ruolian Jiang, Yi Shi; Study on strain and piezoelectric polarization of AlN thin films grown on Si. Journal of Vacuum Science & Technology A 1 July 2005; 23 (4): 628–630. https://doi.org/10.1116/1.1927533 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search