Publication | Closed Access
The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIE
17
Citations
2
References
1996
Year
Electrical EngineeringEnergy HarvestingEngineeringPower Sensor MicrosystemMicrofabricationMechanical EngineeringNano Electro Mechanical SystemInstrumentationMicro-optical ComponentMicroelectronicsMicro-electromechanical System
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