Acoustic emission monitoring during laser shock cleaning of silicon wafers

Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves

J. M. Lee, K. G. Watkins · Journal of Applied Physics · 2001 · 103 citations

Natural Sciences, Materials Engineering, Materials Science +17

In-process monitoring techniques for laser cleaning

J.M. Lee, K. G. Watkins · Optics and Lasers in Engineering · 2000 · 62 citations

Engineering, Chemical Engineering, Manufacturing Engineering +14

Laser removal of copper particles from silicon wafers using UV, visible and IR radiation

J.M. Lee, C. Curran, K. G. Watkins · Applied Physics A · 2001 · 59 citations

Engineering, Materials Engineering, Materials Science +15

Surface cleaning of silicon wafer by laser sparking

J. M. Lee, K. G. Watkins, W. M. Steen · Journal of Laser Applications · 2001 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17