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Interface fracture properties of thin films studied by using the micro-cantilever deflection technique

Materials ScienceEngineeringMicrofabricationMechanical BehaviorMicro-cantilever Deflection TechniqueMechanical EngineeringApplied PhysicsSolid MechanicsMicrostructure-strength RelationshipInterface Fracture PropertiesThin FilmsElectronic PackagingMechanics Of MaterialsMicrostructureThin Film ProcessingInterface Property