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Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsChemical Vapor DepositionSemiconductor Thin FilmsThin Film Mechanical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsOrganic Thin FilmsSputter DepositionSputteringSputtering TechniquesSubstrate Temperature EffectsThin Film Surface CharacterizationThin-film Coatings
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Vacuum · 1994 · 3.3K citations
E. Umbach · TrAC Trends in Analytical Chemistry · 1992 · 2.5K citations