Experimental studies of O₂/Ar plasma in a planar inductive discharge

Abstract

A Langmuir probe was used to determine the electron density, electron temperature, plasma potential and the electron energy probability function (EEPF) in plasma in a planar inductive discharge for a pressure range of 2-30 mTorr. The electron density increases with increased argon content and increases more steeply with increased argon content after the fractional argon flowrate has reached 50%. The measured dc plasma potential and the average electron energy gradually decrease with increased argon content. Mass spectroscopy indicates that the ratio increases with increased pressure and decreases with increased fractional argon flowrate. The measured values are compared to global model (volume averaged) calculations assuming a Maxwellian electron energy distribution.