Influence of Substrate and Process Parameters on The Properties of CVD-SiC

Scratch adhesion testing of hard coatings

A.J. Perry · Thin Solid Films · 1983 · 324 citations

Natural Sciences, Materials Engineering, Materials Science +14

The structure of chemical vapor deposited silicon carbide

Jia Min Chin, P. Gantzel, Robert Hudson · Thin Solid Films · 1977 · 158 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

The determination of composition depth profiles using spherical erosion and scanning Auger electron spectroscopy

V. Thompson, H.E. Hintermann, L. Chollet · Surface Technology · 1979 · 56 citations

Natural Sciences, Earth Sciences, Materials Science +13

Heteroepitaxial growth of β-SiC on silicon substrate using SiCl4-C3H8-H2 system

Hiroyuki Matsunami, Shigehiro Nishino, Tetsuro Tanaka · Journal of Crystal Growth · 1978 · 38 citations

Engineering, Materials Engineering, Materials Science +16

Chemical Vapor Deposition of Silicon Carbide and Silicon Nitride—Chemistry's Contribution to Modern Silicon Ceramics

E. Fitzer, Dieter Hegen · Angewandte Chemie International Edition in English · 1979 · 32 citations

Engineering, Materials Engineering, Materials Science +17