Thin Solid Films · 2004 · 132 citations · 31 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsChemical Vapor DepositionThin Film AnnealingThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsThin Film Deposition MaterialsThin Oxide FilmsThin Oxide LayersThin-film Interface EngineeringThin-film Oxides
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