Sensors and Actuators A Physical · 2001 · 21 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferOptical MaterialsSensorsInfrared DetectorsInfrared InstrumentationInfrared Optical MaterialsInfrared SpectroscopyTemperature SensorsThermal SensorsInfrared SensorsThermal DetectorsThermal Infrared Detectors
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Micromachined thermally based CMOS microsensors
H. Baltes, Oliver Paul, Oliver Brand · Proceedings of the IEEE · 1998 · 259 citations