Deep trench etching in macroporous silicon - Concepedia

Concepedia

Publication | Closed Access

Deep trench etching in macroporous silicon

50

Citations

13

References

2006

Year

T. Geppert, Stefan L. Schweizer, U. Gösele, Ralf B. Wehrspohn

Applied Physics A

EngineeringDeep TrenchMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma Etching

References

	Year	Citations

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