Journal of Micromechanics and Microengineering · 2008 · 117 citations · 9 references
EngineeringManufacturing EngineeringMechanical EngineeringElectrochemical EngineeringMicroelectromechanical SystemsMicrofabricationMachiningMetal FabricationMicrofabrication ProcessesMicromachiningElectrochemical MicromachiningMachining ProcessesMachining TechnologyMicro-scale CuttingMicro-toolingMicroelectromechanical System FabricationToolpath OptimizationVoltage
Electrochemical machining does not wear out the tool, enabling micro‑groove fabrication by moving a tungsten wire electrode along a programmed path. The study presents micro‑wire ECM using a 10 µm tungsten wire as the tool electrode. Ultrashort voltage pulses were applied between the tool electrode and the workpiece to reduce the side gap, and the effects of pulse voltage, on‑time, and period were investigated to identify optimal conditions for stable machining. Under the optimized pulse conditions, micro grooves and gears were successfully fabricated into stainless steel plates.
Micro wire electrochemical machining (ECM) using a Ø 10 µm tungsten wire as the tool electrode is presented. Since electrochemical machining does not wear out the tool, it can be easily applied to the fabrication of micro grooves by moving the tool electrode along a programmed toolpath. To minimize the side gap, ultrashort voltage pulses were applied between the tool electrode and the workpiece. Changes in the side gap according to the applied pulse voltage, pulse on-time and pulse period were investigated, and the optimal pulse condition for stable machining was obtained. By using this method, micro features such as micro grooves and gears were fabricated into stainless steel plates.
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Electrochemical Micromachining
Rolf Schuster, Viola Kirchner, P. Allongue et al. · Science · 2000 · 582 citations
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B.H. Kim, C.W. Na, Y.S. Lee et al. · CIRP Annals · 2005 · 183 citations
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B. Bhattacharyya, J. Munda · International Journal of Machine Tools and Manufacture · 2003 · 162 citations
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