Deposition of high quality GaAs films at fast rates in the LP-CVD system - Concepedia

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Deposition of high quality GaAs films at fast rates in the LP-CVD system

57

Citations

7

References

1989

Year

K. Grüter, M. Deschler, H. Jürgensen, R. Beccard, P. Balk

Journal of Crystal Growth

Fast RatesElectrical EngineeringLp-cvd SystemEngineeringApplied PhysicsThin FilmsPulsed Laser DepositionChemical DepositionOptoelectronicsChemical Vapor DepositionCompound Semiconductor

References

	Year	Citations

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