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Modeling the equivalent oxide thickness of Surrounding Gate SOI devices with high-κ insulators

Semiconductor TechnologyElectrical EngineeringHigh-κ InsulatorsEngineeringSemiconductor DeviceApplied PhysicsCondensed Matter PhysicsElectronic PackagingSilicon On InsulatorMicroelectronicsGate Soi DevicesEquivalent Oxide ThicknessElectrical Insulation