Advances in helium ion microscopy

Precision cutting and patterning of graphene with helium ions

David C. Bell, Max C. Lemme, Lewis Stern et al. · Nanotechnology · 2009 · 364 citations · Full text

Engineering, Materials Engineering, Materials Science +16

An Introduction to the Helium Ion Microscope

John Morgan, John Notte, Raymond Hill et al. · Microscopy Today · 2006 · 140 citations · Full text

Natural Sciences, Materials Science, Physics +10

Sub-10-nm nanolithography with a scanning helium beam

Vadim Sidorkin, Emile van Veldhoven, E. van der Drift et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 135 citations · Full text

Engineering, Materials Engineering, Materials Science +11

Addition of different contributions to the charged particle probe size

J. Barth, P. Kruit · Optik · 1996 · 113 citations

Natural Sciences, Physics, Nuclear Physics +4

The ALIS He ion source and its application to high resolution microscopy

Raymond Hill, John Notte, Bill Ward · Physics Procedia · 2008 · 55 citations · Full text

Engineering, Aerospace Engineering, Materials Engineering +17