Publication | Closed Access
Effects of photoresist polymer molecular weight on line-edge roughness and its metrology probed with Monte Carlo simulations
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Citations
28
References
2004
Year
Materials SciencePolymer ChemistryEngineeringPolymer ScienceApplied PhysicsPhotopolymer NetworkLine-edge RoughnessMolecular PolymerSoft MatterPolymer Modeling3D PrintingMonte Carlo Simulations
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