Surface and Coatings Technology · 2007 · 118 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface EngineeringSurface ScienceCoating ProcessesCoating TechnologyCoatingsSurface CoatingsThin-film DepositionThin-film MaterialsAluminum NitrideMagnetron SputteringSilicon NitrideSputter DepositionTitanium Nitride Coatings
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